Infrared radiation thermometer for semiconductors and silicon IR-CAT
For semiconductors

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The IR-CA series is a stationary radiation thermometer with an integrated digital temperature display, parameter setting function, and external measurement value output on the main unit.
We offer 17 models, including general-purpose models such as low temperature, medium to high temperature, high performance, and extra wide models, as well as models specific to specific applications, to support non-contact temperature measurement in a wide range of fields.

Semiconductor/silicon wafer temperature measurement

radiation thermometer capable of measuring the temperature of silicon wafers from 400℃ to 1200℃. The measurement wavelength is used so that the wafer becomes opaque, reducing the influence of the heater on the back surface.

Other features

  • Integrated structure with built-in digital temperature display and parameter setting function that can be operation from the main unit
  • high accuracy, high-speed response, high reliability
  • communication interface: RS-485 (MODBUS) available as option
  • A display device is available for remote monitoring of IR-CA and remote configuration remote.
    Settings and display can be performed by RS-485 communication.
  • Data recording software available
  • accessories such as protective cases and water cooling plates are available to suit the installation environment.

Specifications

Model For semiconductors and silicon
Models IR-CAT
Detecting element Si
Wavelength 0.6～0.96μm
Measurement temperature range 400～800℃（100）
500～1000℃（200）
600～1200℃（200）
Accuracy ratings Below 200℃: ±2℃
200℃ or higher: ±1% of measured value
Repeatability Within 0.5℃
Resolution 0.5℃
Response time 0.04s (95%)
Measurement diameter/measurement distance focusable
Measurement distance: 0.5m to infinity
Measurement diameter = Measurement distance / distance factor
distance factor: 100, 200
Aiming Direct View Finder
Output Signal 4 to 20mA DC, isolated output (impervious resistance 500Ω or less)
communication interface RS-485 (option)
Power supply 24V DC
Power consumption Maximum 10VA
External dimensions W150xH110xD66mm
Weight 約1.3kg
Others Data processing software: IR-VXC1

Download Documents & Softwares

Catalog

Specification Sheet (PS Sheet)

  • IR-CA series: radiation thermometer for specific applications (for films, objects inside furnaces, and semiconductors)
    ファイルサイズ1MB
    Document No.
    PP-97-3
    Downloads
  • IR-CA series accessories, setting display
    ファイルサイズ2MB
    Document No.
    PP-98-3
    Downloads
  • English) IR-CA radiation thermometer
    ファイルサイズ1MB
    Document No.
    PSE-469
    Downloads

CAD Data

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*If you wish to download, please login as a member and click "Download."
  • IR-CAR/IR-CAT/IR-CAU (with finder, terminal connection)
    ファイルサイズ1MB
    Downloads
  • IR-CAR/IR-CAT/IR-CAU (without finder, terminal connection)
    ファイルサイズ1MB
    Downloads
  • IR-CAR/IR-CAT/IR-CAU (with finder, connector connection)
    ファイルサイズ1MB
    Downloads
  • IR-CAR/IR-CAT/IR-CAU (without finder, connector connection)
    ファイルサイズ1MB
    Downloads
  • IR-CAR/IR-CAT/IR-CAU (with close-up lens, viewfinder, terminal connection)
    ファイルサイズ1MB
    Downloads
  • IR-CAR/IR-CAT/IR-CAU (with close-up lens, no viewfinder, terminal connection)
    ファイルサイズ1MB
    Downloads
  • IR-CAR/IR-CAT/IR-CAU (with close-up lens, viewfinder, connector connection)
    ファイルサイズ1MB
    Downloads
  • IR-CAR/IR-CAT/IR-CAU (with close-up lens, no viewfinder, connector connection)
    ファイルサイズ1MB
    Downloads
  • Setting display IR-GZA
    ファイルサイズ1MB
    Downloads

Instruction Manual

*Downloading materials is a members-only service.
*If you wish to download, please login as a member and click "Download."
  • IR-CA [Communication] (Communication protocol: PriV specifications only)
    ファイルサイズ1MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU
    Document No.
    RX-MCA0872-PP2
    Downloads
  • Monochromatic radiation thermometer IR-CA [software volume]
    ファイルサイズ2MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU
    Document No.
    RX-MCA0272-P11
    Downloads
  • Monochromatic, focusable type radiation thermometer IR-CA [hardware version]
    ファイルサイズ1MB
    Models
    IR-CAR, IR-CAT, IR-CAU
    Document No.
    RX-MCA0274-P14CE
    Downloads
  • radiation thermometer setting display IR-GZ01 discontinued
    ファイルサイズ2MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU,IR-CZH,IR-CZI,IR-CZK,IR-CZP,IR-CZQ,IR-CZS,IR- SAB,IR-SAH,IR-SAI,IR-SAS
    Document No.
    RX-MGZ0357-P9
    Downloads
  • radiation thermometer setting display IR-GZ11, IR-GZ21 sales discontinued
    ファイルサイズ3MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU,IR-CZH,IR-CZI,IR-CZK,IR-CZP,IR-CZQ,IR-CZS,IR- SAB,IR-SAH,IR-SAI,IR-SAS
    Document No.
    RX-MGZ0358-P8
    Downloads
  • radiation thermometer setting display IR-GZA
    ファイルサイズ2MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU,IR-CZH,IR-CZI,IR-CZK,IR-CZP,IR-CZQ,IR-CZS,IR- SAB,IR-SAH,IR-SAI,IR-SAS
    Document No.
    RX-MGZ0411-P4
    Downloads
  • radiation thermometer setting display IR-GZA [Communication]
    ファイルサイズ1MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU,IR-CZH,IR-CZI,IR-CZK,IR-CZP,IR-CZQ,IR-CZS,IR- SAB,IR-SAH,IR-SAI,IR-SAS
    Document No.
    RX-MGZ0920-P0
    Downloads
  • English)IR-CA Communications(Options)
    ファイルサイズ1MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAU,IR-CAT
    Document No.
    RX-MECA0463-0P0
    Downloads
  • English)IR-CAB, IR-CAE, IR-CAG,IR-CAI, IR-CAM, IR-CAN,IR-CAP, IR-CAR, IR-CAS,IR-CAT, IR-CAU, IR-CAW Single color radiation thermometer [Software volume]
    ファイルサイズ1MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU
    Document No.
    RX-MECA0453-P5
    Downloads
  • English)IR-CAE, IR-CAG, IR-CAI,IR-CAP, IR-CAR, IR-CAS,IR-CAT, IR-CAU Single color radiation thermometer focusable type [Hardware volume]
    ファイルサイズ1MB
    Models
    IR-CAR, IR-CAT, IR-CAU
    Document No.
    RX-MECA0455-P9CE
    Downloads
  • English)IR-GZ11,IR-GZ21 Setting display unit with remote emissivity setting /reflection correction sales ended
    ファイルサイズ3MB
    Models
    IR-CAB,IR-CAM,IR-CAN,IR-CAR,IR-CAT,IR-CAU,IR-CZH,IR-CZI,IR-CZK,IR-CZP,IR-CZQ,IR-CZS,IR- SAB,IR-SAH,IR-SAI,IR-SAS
    Document No.
    RX-MEGZ0513-P8
    Downloads

Softwares

Application Examples

Related Info

Movie

FAQ

If you have any problems with temperature control,
 please feel free to contact us.

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